CSEM has partnered with Nanox Imaging Ltd to develop groundbreaking MEMS chips for advanced X-ray medical imaging systems.
CSEM, renowned for its expertise in micro-electro-mechanical systems (MEMS), has collaborated with Nanox Imaging Ltd to produce revolutionary MEMS chips. These chips, which are an integral part of Nanox’s new Digital Tomosynthesis system, promise to transform medical X-ray imaging.
Nanox’s mission is to improve early detection and treatment by enabling medical institutions to integrate end-to-end systems or modular approaches that incorporate Nanox technologies. Unlike traditional hot cathode X-ray tubes, Nanox’s system uses a cold cathode tube that generates electron flux through a field emission chip. This approach, using CSEM’s microfabricated MEMS chips, provides enhanced visualization of anatomical structures, improving diagnostic accuracy.
The collaboration leverages CSEM’s 30 years of experience in MEMS technology, with production taking place in its state-of-the-art 150mm wafer clean room. The MEMS chip consists of millions of uniformly shaped nanocones, each a few hundred nanometers in size, which enable efficient electron emission. Senior R&D Engineer Thomas Overstolz highlighted the precision required to develop these chips, which involve a unique electrochemical etching process.
Initial tests have shown promising results, leading to the next phase of refining the micromanufacturing process in collaboration with Nanox. The goal is to eventually produce MEMS chips on an industrial scale for Nanox, Overstolz said: “CSEM is also prepared to eventually produce the MEMS chip in industrial volume for Nanox.”
Breakthrough medical imaging technology
The innovative Nanox.ARC system developed by Nanox offers several advantages over conventional imaging systems. The cold cathode tube, unlike conventional hot cathode tubes, does not require standby power and can be turned on and off instantly. This feature allows multiple tubes, or chips within a single tube, to be placed close together, enhancing imaging capabilities without the risk of x-ray radiation from neighboring sources.
Jim Dara, General Manager of Nanox’s Source & Services Division, praised the partnership: “We greatly appreciate the professionalism demonstrated by the team at CSEM. Their validation of Nanox technology enabled the production of a functional MEMS chip in under a year.”
